We are also getting a very similar warning to the one posted by @COPAtec. In our case it seems to have a different file name though.
Failed to merge raw profiles in directory /Users/<user>/Library/Developer/Xcode/DerivedData/<project>/Build/ProfileData/<UUID> to destination /Users/<user>/Library/Developer/Xcode/DerivedData/<project>/Build/ProfileData/<UUID>/CoverageAggregate1.profdata: Aggregation tool '/Applications/Xcode.app/Contents/Developer/Toolchains/XcodeDefault.xctoolchain/usr/bin/llvm-profdata' failed with exit code 1
flo_23
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I can confirm that I'm also able to archive the linked project using Xcode 13.0 (13A233)