I have the same issue
I am using FreeBSD 12.2, and Samba 4.13.1 on ZFS. I get the following logs:
2020-11-12 20:00:42.825043-0800	localhost backupd[228]: (TimeMachine) [com.apple.TimeMachine:General] Starting manual backup
2020-11-12 20:00:43.566026-0800	localhost backupd[228]: (TimeMachine) [com.apple.TimeMachine:General] Attempting to mount 'smb://dan@MCP._smb._tcp.local./TARDIS'
2020-11-12 20:00:48.015281-0800	localhost backupd[228]: (TimeMachine) [com.apple.TimeMachine:General] Mounted 'smb://dan@MCP._smb._tcp.local./TARDIS' at '/Volumes/.timemachine/MCP._smb._tcp.local./10C38CAC-5552-4854-A5FB-DB4D083970B1/TARDIS'
2020-11-12 20:00:48.019341-0800	localhost backupd[228]: (TimeMachine) [com.apple.TimeMachine:General] Initial network volume parameters for 'TARDIS' {disablePrimaryReconnect: 0, disableSecondaryReconnect: 0, reconnectTimeOut: 60, QoS: 0x0, attributes: 0x1C}
2020-11-12 20:00:48.107521-0800	localhost backupd[228]: (TimeMachine) [com.apple.TimeMachine:General] Configured network volume parameters for 'TARDIS' {disablePrimaryReconnect: 0, disableSecondaryReconnect: 0, reconnectTimeOut: 30, QoS: 0x20, attributes: 0x1C}
2020-11-12 20:00:48.114865-0800	localhost backupd[228]: (TimeMachine) [com.apple.TimeMachine:General] Mountpoint '/Volumes/.timemachine/MCP._smb._tcp.local./10C38CAC-5552-4854-A5FB-DB4D083970B1/TARDIS' is still valid
2020-11-12 20:00:48.165262-0800	localhost backupd[228]: (TimeMachine) [com.apple.TimeMachine:General] Mountpoint '/Volumes/.timemachine/MCP._smb._tcp.local./10C38CAC-5552-4854-A5FB-DB4D083970B1/TARDIS' is still valid
2020-11-12 20:00:48.171698-0800	localhost backupd[228]: (TimeMachine) [com.apple.TimeMachine:General] Creating an encrypted sparsebundle using Case-sensitive APFS filesystem
2020-11-12 20:00:48.356751-0800	localhost backupd[228]: (TimeMachine) [com.apple.TimeMachine:General] Failed to create '/Volumes/.timemachine/MCP._smb._tcp.local./10C38CAC-5552-4854-A5FB-DB4D083970B1/TARDIS/F03E9C12-E5FB-5132-A445-66BCEB0A6541.sparsebundle', results: {
}, error: 13 Permission denied
2020-11-12 20:00:50.719711-0800	localhost backupd[228]: (TimeMachine) [com.apple.TimeMachine:General] Mountpoint '/System/Volumes/Data' is still valid
2020-11-12 20:00:50.720493-0800	localhost backupd[228]: (TimeMachine) [com.apple.TimeMachine:General] Backup failed (20: BACKUP_FAILED_DISK_IMAGE_NOT_CREATED)
On the Samba share the following is created:
drw-------	2 dan	 dan			 2B Nov 12 20:00 F03E9C12-E5FB-5132-A445-66BCEB0A6541.sparsebundle/
This setup worked on Catalina
ScruffyDan
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! got it to work, though I am not sure my solution will work for those not using zfs
I had my vsf objects in the correct order
I replaced vfs objects = catia fruit streams\_xattr zfsacl
with vfs objects = zfsacl catia fruit streams_xattr