Same here for me. 'Command Line Tools for Xcode 15 beta 4' had the same issue. Downgrading to Beta 2 circumvents the errors installing version 1.0.2. I'm on Sonoma 14.0 beta 3 update/build 23A5286i July 11th public beta release.
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$ sudo rm -rf /Library/Developer/CommandLineTools
to uninstall the Command Line tools. Then install the Beta 2 version instead.
$ sudo rm -rf /Library/Developer/CommandLineTools
to uninstall the Command Line tools. Then install the Beta 2 version instead.