Capturing System Trace with Instruments kills the system

I'm using macOS BigSur, Instruments 12.4.

Every time I try to capture a System Trace (no matter how short) it leads to the entire system eventually getting stuck.

First of all Instruments starts analyzing data, and at some point stops moving further.

If I try to kill Instruments - it goes away from the Force Quit Applications list, but still stays on screen.

At this point, I'm not able to close any other applications or even shut down the system - everything starts getting stuck.

The only way to recover is to do a hard power reset.

This is on a MacBook Pro.

Is there a solution for this?