I have the same issue with Xcode 13 beta 5 and iPhone SE 2nd gen. iOS 15 b5. Nothing seems to help, restarting, rebooting, cleaning build folder, wiggle the cable, been at it for hours.
However, I also have an iPhone X iOS 15 b5 and that works without problems, even after erasing and setting up fresh multiple times. It takes just a couple of seconds to prepare the phone for development.