Same issue. XCode 14.3.1 and Pods 1.12.1. Just updated pods using brew (brew upgrade Cocoapods).
Tried Product -> Clean build folder. Archive still has issue with rsync.
rsync error: some files could not be transferred (code 23) at /AppleInternal/Library/BuildRoots/UUID/Library/Caches/....
Command PhaseScriptExecution failed with a nonzero exit code
Maybe I'll try blowing away everything under Caches.